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Optical substrates

Product Description: 

Precision Micro-Optics offers Optical substrates made of a variety of glass materials depending on the applications. The applications range from fused quartz parts in optics and fiber optical communications to borosilicate glass parts in semi-conductor manufacturing. Below is the general specs and custom requirements are welcome.

 

 

Figure 1: Optical substrates

Features: 

  • A variety of glass materials are available    
  • Wafer size from 2 to 8 inches are available for all types
  • Thin wafer down to 50μm for 1 inch, 100μm for 2 inch, 125μm for 3 inch and 170μm for 4 inch are available
  • Ultra Flat wafers down to less than 3μm for 2 inch TTV, 5μm for 3 inch TTV, 8μm for 4 inch TTV and 15μm for 6 inch TTV are available upon request

Specification: 

Materials   Fused silica/borosilicate glass/B270 etc
SPEC
Unit 3″ 4″ 5″ 6″
Diameter (Square)
mm
76.2 100
125
150
Tolerance (±)
mm 0.25 0.5 0.5 0.5
Thickness (±)
mm ≥0.1 ≥0.18 ≥0.3 ≥0.5
Primary Reference Flat
mm 22 or customized 32.5 or customized 42.5 or customized 57.5 or customized
TTV µm ≤8µm ≤10µm ≤15µm ≤20µm
BOW µm ±20µm ±25µm ±40µm ±40µm
LTV (5mmX5mm)
µm ≤2µm ≤2µm ≤2µm ≤2µm
Wrap µm ≤30µm ≤40µm ≤50µm ≤50µm
PLTV % ≥90%(5mmX5mm) ≥90%(5mmX5mm) ≥90%(5mmX5mm) ≥90%(5mmX5mm)
Edge Rounding mm  Compliant with SEMI M1.2 Standard/refer to IEC62276
Surface Type    Single Side Polished /Double Sides Polished
Polished side Ra nm  ≤1
Back Side Criteria µm  general 0.2-0.5 or as customized
Appearance    No cracks, saw marks, stains, striations, Scratch and Contamination

 

High Refractive Index H-ZF3 wafer: 

6 inch H-ZF3 wafers in stock, thickness: 0.25mm, double side polished, PWSB-75642($130.0): 

 
 

 
Contact us for quantity pricing.

 

6 inch H-ZF3 wafers in stock, thickness: 0.35mm, double side polished, PWSB-75K42($85.0): 

 
 

 
Contact us for quantity pricing.

 

6 inch H-ZF52N wafers in stock, thickness: 0.5mm, double side polished, PWSB-85142($96.0): 

 
 

 
Contact us for quantity pricing.

 

Fused Silica JGS1 Wafer: 

20 X 20mm JGS1 fused silica wafer in stock, thickness: 175.0um, double side polished, PWSB-1A072($20.0): 

 
 

 
Contact us for quantity pricing.

129 X 69mm JGS1 fused silica wafer in stock, thickness: 4.0mm, double side polished, PWSB-1A032($152.0): 

 
 

 
Contact us for quantity pricing.

 

Fused Silica JGS2 Wafer: 

25.4X25.4mm JGS2 fused silica wafers in stock, thickness: 0.05mm, double side polished, PWSB-2A052($28.0): 

 
 

 
Contact us for quantity pricing.

1 inch JGS2 fused silica wafers in stock, thickness: 0.05mm, double side polished, PWSB-26852($25.0): 

 
 

 
1 inch JGS2 fused silica wafers in stock. Contact us for quantity pricing.

1 inch JGS2 fused silica wafers in stock, thickness: 0.07mm, double side polished, PWSB-21C46($25.0): 

 
 

 
Contact us for quantity pricing.

2 inch JGS2 fused silica wafers in stock, thickness: 0.1mm, double side polished, PWSB-21712($28.0): 

 
 

 
2 inch JGS2 fused silica wafers in stock. Contact us for quantity pricing.

3 inch JGS2 fused silica wafers in stock, thickness: 0.125mm, double side polished, PWSB-22022($38.0): 

 
 

 
Contact us for quantity pricing.

4 inch JGS2 fused silica wafers in stock, thickness: 0.5mm, double side polished, PWSB-23132($25.0): 

 
 

 
Contact us for quantity pricing.

4 inch JGS2 fused silica wafers in stock, thickness: 1.0mm, double side polished, PWSB-23532($32.0): 

 
 

 
Contact us for quantity pricing.

6 inch JGS2 fused silica wafers in stock, thickness: 0.3mm, single side polished, PWSB-25J41($68.0): 

 
 

 
6 inch JGS2 fused silica wafers in stock. Contact us for quantity pricing.

6 inch JGS2 fused silica wafers in stock, thickness: 0.5mm, double side polished, PWSB-25142($60.0): 

 
 

 
6 inch JGS2 fused silica wafers in stock. Contact us for quantity pricing.

6 inch JGS2 fused silica wafers in stock, thickness: 1.0mm, double side polished, PWSB-25542($66.0): 

 
 

 
6 inch JGS2 fused silica wafers in stock. Contact us for quantity pricing.

4 X 25mm JGS2 fused silica wafer in stock, thickness: 1.0mm, double side polished, PWSB-2A062($9.0): 

 
 

 
Contact us for quantity pricing.

20 X 20mm JGS2 fused silica wafer in stock, thickness: 175.0um, double side polished, PWSB-2A072($16.0): 

 
 

 
Contact us for quantity pricing.

4 X 4 inch JGS2 fused silica wafer in stock, thickness: 1/16inch, double side polished, PWSB-2A082($48.0): 

 
 

 
Contact us for quantity pricing.

150 X 75mm JGS2 fused silica wafer in stock, thickness: 10.0mm, double side polished, PWSB-2A012($168.0): 

 
 

 
Contact us for quantity pricing.

140 X 70mm JGS2 fused silica wafer in stock, thickness: 5.0mm, double side polished, PWSB-2A022($125.0): 

 
 

 
Contact us for quantity pricing.

Borofloat33 Wafer: 

0.3 inch X 0.05 inch X0.006 inch Borofloat33 wafers in stock, double side polished, PWSB-3A042($7.0): 

 
 

 
Contact us for quantity pricing.

4 inch Borofloat33 wafers in stock, thickness: 0.1mm, double side polished, PWSB-33732($48.0): 

 
 

 
Contact us for quantity pricing.

4 inch Borofloat33 wafers in stock, thickness: 0.17mm, double side polished, PWSB-33A32($38.0): 

 
 

 
Contact us for quantity pricing.

4 inch Borofloat33 wafers in stock, thickness: 0.5mm, double side polished, PWSB-33132($20.0): 

 
 

 
4 inch Borofloat33 wafers in stock. Contact us for quantity pricing.

4 inch Borofloat33 wafers in stock, thickness: 1.0mm, double side polished, PWSB-33532($28.0): 

 
 

 
Contact us for quantity pricing.

6 inch Borofloat33 wafers in stock, thickness: 0.5mm, double side polished, PWSB-35142($42.0): 

 
 

 
6 inch Borofloat33 wafers in stock. Contact us for quantity pricing.

6 inch Borofloat33 wafers in stock, thickness: 1.0mm, double side polished, PWSB-35542($46.0): 

 
 

 
6 inch Borofloat33 wafers in stock. Contact us for quantity pricing.

B270 Wafer: 

4 inch B270 wafers in stock, thickness: 0.5mm, double side polished, PWSB-53132($22.0): 

 
 

 
4 inch B270 wafers in stock. Contact us for quantity pricing.

6 inch B270 wafers in stock, thickness: 1.0mm, double side polished, PWSB-55542($40.0): 

 
 

 
6 inch B270 wafers in stock. Contact us for quantity pricing.

H-K9L Wafer: 

2 inch H-K9L wafers in stock, thickness: 0.4mm, double side polished, PWSB-61962($18.0): 

 
 

 
Contact us for quantity pricing.

2 inch H-K9L wafers in stock, thickness: 0.7mm, double side polished, PWSB-61362($18.0): 

 
 

 
Contact us for quantity pricing.

2 inch H-K9L wafers in stock, thickness: 1.0mm, double side polished, PWSB-61562($18.0): 

 
 

 
Contact us for quantity pricing.

4 inch H-K9L wafers in stock, thickness: 0.5mm, double side polished, PWSB-63132($22.0): 

 
 

 
4 inch BK7 wafers in stock. Contact us for quantity pricing.

4 inch H-K9L wafers in stock, thickness: 1.0mm, double side polished, PWSB-63532($30.0): 

 
 

 
4 inch BK7 wafers in stock. Contact us for quantity pricing.

6 inch H-K9L wafers in stock, thickness: 1.0mm, double side polished, PWSB-65542($40.0): 

 
 

 
6 inch BK7 wafers in stock. Contact us for quantity pricing.

6 inch H-K9L wafers in stock, thickness: 0.6mm, double side polished, PWSB-65L42($48.0): 

 
 

 
6 inch BK7 wafers in stock. Contact us for quantity pricing.

 

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